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Mahr Metrology - CWM 100

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3D optical measurement system – confocal microscope with integrated white light interferometer – for measurement and evaluation of surface structures and small components
  • High precision - non-contact measurement of surface structures
  • Your results are correct!
  • Fast measurement - short measuring time
Features
  • For measurements on technical, optical and reflecting surfaces as well as on printed circuit boards (semiconductor industry) a 3D topographical analysis (areal measurement) with high information density is required. Soft and thin-walled materials also require non-contact measurement. Moreover, ever higher levels of surface quality are being achieved, greatly increasing the requirements placed on measuring systems in terms of resolution and measuring accuracy.
  • Highly accurate and non-conatct measurement of surface structures.
  • High precision with sub-nanometer resolution
  • Main application field for the confocal sensor is the measurement of rough and dark surface structures and small components.
  • Main application field for the white light interferometer is the measurement of fine, polished and shiny surface structures including glass and optical surfaces
  • Microscope field of view, easily enlargeable by fully automated stitching procedure

Technical Data
Measuring principle
By interferometer, by white light interferometer and confocal
Light source (KFM and WLI): LED, 505 nm
Measuring range mm
Sensor unit can be moved 100 mm in Z, CNC controlled
Object table can be moved 100 mm in X and Y, CNC controlled

Interferometer, white light interferometer:
Measuring range (WLI): More as 4 mm (Standard mode), more as 20 mm in extended mode

Confocal microscope:
Measuring range (KFM): Up to 10 mm (depending on resolution in Z and lens)
Interfaces
230 V, 50 Hz

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